Ming-Tzung Hsu

Title: Innovations by Ming-Tzung Hsu

Introduction

Ming-Tzung Hsu is a notable inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of five patents. His work focuses on improving slurry supply and dispensing systems, which are crucial in chemical mechanical polishing processes.

Latest Patents

One of his latest patents is a slurry supply system. This system features multiple supply modules and a flushing module that can be concurrently coupled to the supply modules. Each supply module includes a slurry reservoir and at least one delivery line directed toward a chemical mechanical polishing apparatus. The flushing module is equipped with a flushing liquid reservoir and multiple flushing lines, allowing selective flushing of the delivery lines.

Another significant patent is a slurry dispensing system. This system consists of a first supply station, a second supply station, and two loops that can be selectively connected to both supply stations. The system includes valves that control the flow of slurry to points of use, ensuring efficient delivery from either supply station.

Career Highlights

Ming-Tzung Hsu works at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His innovative designs and patents have contributed to advancements in manufacturing processes, enhancing efficiency and effectiveness in the industry.

Collaborations

He has collaborated with notable coworkers, including Biing-Huang Yang and Long-Chun Tsai. Their combined expertise has fostered a productive environment for innovation and development in semiconductor technologies.

Conclusion

Ming-Tzung Hsu's contributions to the field of semiconductor manufacturing through his patents and collaborative efforts highlight his role as a key innovator. His work continues to influence advancements in the industry, showcasing the importance of innovation in technology.