Taiwan Semiconductor Manufacturing Comp. Ltd.

Ming-Tzung Hsu

Biing-Huang Yang

Paul Tan

Long-Chun Tsai

Chih-Chiang Yang

Cho-Ching Chen

Chiang-Jeh Chen

Long Chun Tsai

Hui-Ming Chu

Wei-Cheng Lee

Hang-Chang Lee

A slurry supply system with multiple supply modules and a flushing module concurrently coupled to the multiple supply modules is provided. Each supply module includes a slurry reservoir and at least one delivery line connecting to the slurry reservoir, wherein each delivery line is oriented toward a chemical mechanical polishing apparatus. The flushing module includes a flushing liquid reservoir and multiple flushing lines connecting to the flushing liquid reservoir, wherein each flushing line is coupled to each delivery line thereby the flush module can selectively flush one of the delivery lines.

Slurry supply system

A slurry dispensing system comprises a first supply station, a second supply station, a first loop, a second loop, a first valve and a second valve. The first loop is selectively connected to the first supply station and the second supply station. The second loop is also selectively connected to the first supply station and the second supply station. The first valve connects the first loop to points of use. The second valve connects the second loop to the points of use. When slurry is supplied to the first loop from the first slurry station, slurry is supplied to the second loop from the second slurry station. When the first valve is opened and the second valve is closed, slurry is supplied to the points of use from the first loop.

Slurry dispensing system

Within an apparatus for storing a liquid, there is first included a storage tank. The storage tank has formed integral thereto and in fluid communication therewith a liquid inlet port and a liquid outlet port. The storage tank also has formed integral thereto and in fluid communication therewith a gas inlet port and a gas outlet port. Finally, the gas outlet port has connected thereto and in fluid communication therewith a floating plug valve. The floating plug valve comprises a first plug movably positioned over and sealing a first aperture within the floating plug valve such that a first weight of the first plug and a first area of the first aperture define an upper operating pressure of a gas introduced into the storage tank through the gas inlet port. The apparatus of the present invention also contemplates a floating plug valve employed within the apparatus of the present invention.

Floating plug valve apparatus for storing and dispensing high purity liquid

An apparatus and a method for supplying uninterrupted gas by using an automatic switching gas supply system are provided. In the apparatus, a main gas supply source and at least one back-up gas supply source are provided which are connected by a plurality of conduits to a process tool. The conduits further include pressure regulators such that a gas pressure from the main gas supply source is always regulated at about 0.5 Kg/cm,&tilde;1 Kg/cm,higher than a gas pressure from the back-up gas supply source. The apparatus operates by pneumatic means so that no electric power is required. The apparatus further operates automatically by switching from the main gas supply source to the back-up gas supply source when the pressure drop in the main gas supply source exceeds the pressure differential that is preset in the system, e.g., between about 0.5 Kg/cm,and about 1 Kg/cm,. Any other suitable range of pressure differential may also be used depending on the type of gases transported and the conduits used.

Apparatus and method for supplying uninterrupted gas

A mechanical wet air generator which is constructed by an inner container, an outer container, a fluid level controller and a multiplicity of Rashing rings filled in the inner container is provided. In the wet air generator, the inner container is formed of honeycomb panels such that large bubbles cannot go through and furthermore, the multiplicity of Rashing rings functions as bubble-breaking solid shapes further prevents large bubbles from exiting the wet air generator and insuring the proper functioning of the generator. The present invention novel mechanical wet air generator is provided with a fluid level controller which consists of a floater, a floating valve, and a linkage connecting thereinbetween. The novel fluid level controller effectively prevents any possibility of overflow of fluid, or water, into a slurry supply pipe to which the wet air generator supplies a wet air or wet N,for transporting and for blanketing the slurry solution. The present invention novel wet air generator effectively increases the % RH of clean dry air from 10&tilde;40% to 70&tilde;99%.

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Hsin-Chu, Taiwan

Ming-Tzung Hsu