The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2001
Filed:
Aug. 03, 1999
Taiwan Semiconductor Manufacturing Company, Ltd, Hsin Chu, TW;
Abstract
A mechanical wet air generator which is constructed by an inner container, an outer container, a fluid level controller and a multiplicity of Rashing rings filled in the inner container is provided. In the wet air generator, the inner container is formed of honeycomb panels such that large bubbles cannot go through and furthermore, the multiplicity of Rashing rings functions as bubble-breaking solid shapes further prevents large bubbles from exiting the wet air generator and insuring the proper functioning of the generator. The present invention novel mechanical wet air generator is provided with a fluid level controller which consists of a floater, a floating valve, and a linkage connecting thereinbetween. The novel fluid level controller effectively prevents any possibility of overflow of fluid, or water, into a slurry supply pipe to which the wet air generator supplies a wet air or wet N,for transporting and for blanketing the slurry solution. The present invention novel wet air generator effectively increases the % RH of clean dry air from 10˜40% to 70˜99%.