Company Filing History:
Years Active: 1995-1999
Title: **Inventor Ming-Tsung Liu: Pioneering Innovations in Semiconductor Technology**
Introduction
Ming-Tsung Liu is a notable inventor based in Hsinchu, Taiwan, recognized for his contributions to the field of semiconductor technology. With an impressive portfolio of six patents, Liu has made significant advancements in fabrication methods that enhance the performance and reliability of electronic devices.
Latest Patents
Ming-Tsung Liu's latest innovations include:
1. **Method for Fabricating a Shallow Trench Isolation Structure**
This invention outlines a method for creating a shallow trench isolation (STI) structure that employs a pad oxide layer and a hard masking layer. The process includes forming a trench in a semiconductor substrate and creating an insulating layer that minimizes dishing and microscratches. This method enhances the planarity of the substrate and assures better performance for the integrated circuits built on it.
2. **Method of Etching Metal with Increased Etching Selectivity**
Liu's second patent addresses the issue of etching metal with improved selectivity compared to photoresist layers. This method involves several steps, including the formation of a cap oxide layer and an ion implantation process prior to etching. The innovative approach provides a significant enhancement in the selectivity of metal-to-photoresist etching, addressing industry challenges in semiconductor manufacturing.
Career Highlights
Ming-Tsung Liu has worked with prominent companies in the semiconductor industry, including United Microelectronics Corporation and United Semiconductor Corporation. His experience in these leading firms has enabled him to develop cutting-edge technologies and strategies that have been integral to the advancement of semiconductor fabrication processes.
Collaborations
Throughout his career, Liu has collaborated with esteemed colleagues, such as Tsun-Tsai Chang and Tsung-Yuan Hung. These partnerships have fostered a creative environment that has led to the successful development of innovative solutions in the semiconductor domain.
Conclusion
Ming-Tsung Liu's contributions to semiconductor technology through his patented inventions underscore his status as a forward-thinking inventor. His work not only enhances the manufacturing processes but also paves the way for future innovations in the electronic industry. As technology continues to evolve, Liu's advancements will undoubtedly play a crucial role in shaping the future of semiconductor applications.