Ming-Hua Liu

Title: Revolutionary Innovations by Inventor Ming-Hua Liu

Introduction

Ming-Hua Liu is a distinguished inventor based in Taichung, Taiwan, known for his remarkable contributions to the field of microelectronics. With a total of six patents to his name, Liu has made significant advancements in the development of integrated circuit technologies, focusing on methods that enhance the efficiency and effectiveness of semiconductor fabrication.

Latest Patents

Among his latest inventions is a novel method of removing photoresist at the edge of wafers, which is crucial in the production of integrated circuits. This method involves several steps beginning with the provision of a substrate housing a MOS component region. A layer of photoresist is then formed over this substrate, which is subsequently patterned through exposure and development. The breakthrough lies in the removal of the photoresist layer at the substrate's edge using a combination of a chemical reagent and centrifugal effects, optimizing the cleaning process.

Another notable patent by Liu details a method of forming a self-aligned contact for DRAM cells. This invention consists of several layers, including a MOS transistor with a gate and source/drain regions. Liu’s technique involves the sequential formation and planarization of multiple insulating layers. By employing a contact window mask, he innovatively utilizes anisotropic dry etching and isotropic wet etching to expose the source/drain regions, thus facilitating the creation of a self-aligned contact that enhances the functionality of DRAM cells.

Career Highlights

Ming-Hua Liu is currently affiliated with United Microelectronics Corporation, a key player in the semiconductor industry. His work there has significantly influenced the development of state-of-the-art processes in semiconductor manufacturing.

Collaborations

Throughout his career, Liu has collaborated with fellow experts, including Sun-Chieh Chien and Chuck Chen. These partnerships have amplified his ability to innovate and keep pace with the rapidly evolving technology landscape.

Conclusion

Ming-Hua Liu’s contributions through his patents not only underline his expertise as an inventor but also reflect his commitment to enhancing semiconductor technology. His innovative methods continue to pave the way for advancements in the industry, ensuring improved performance and efficiency for future electronic devices.