Ann Arbor, MI, United States of America

Min-Yeong Moon

USPTO Granted Patents = 7 

Average Co-Inventor Count = 3.9

ph-index = 1

Forward Citations = 2(Granted Patents)


Company Filing History:


Years Active: 2022-2025

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7 patents (USPTO):Explore Patents

Title: **Innovative Contributions of Min-Yeong Moon**

Introduction

Min-Yeong Moon, an esteemed inventor based in Ann Arbor, MI, has made significant contributions to the field of measurement technologies. With a prolific portfolio boasting seven patents, his work primarily focuses on advancing methods for wafer tilt and overlay measurement, particularly in the context of semiconductor manufacturing.

Latest Patents

Min-Yeong Moon's latest patents illustrate his cutting-edge approach to measurement systems. One of his notable inventions is a method and system for the measurement of tilt and overlay of a structure. This innovation utilizes an asymmetry response metric alongside established wafer statistics to improve measurement accuracy. The technique involves spectral measurements conducted at two distinct azimuth angles, optimizing sensitivity to wafer variations.

Another significant contribution by Moon is the estimation of in-die overlay with tool induced shift correction. This metrology module employs an estimation model that operates based solely on one azimuth angle’s spectral data. It utilizes machine learning algorithms that are trained on a combination of traditional metrology measurements and tool induced shift samples, enhancing the precision of overlay estimations in semiconductor processes.

Career Highlights

Currently, Min-Yeong Moon works at Kla Corporation, where he continues to innovate within the realms of measurement technology. His expertise and contributions significantly enhance the company's capabilities in semiconductor metrology, ensuring greater accuracy and efficiency in manufacturing processes.

Collaborations

Throughout his career, Moon has collaborated with notable coworkers such as Stilian Pandev and Dimitry Sanko. These collaborative efforts foster a creative environment that propels the development of advanced measurement techniques, contributing to the industry’s evolution.

Conclusion

Min-Yeong Moon stands out as a pioneering inventor whose work has profoundly impacted semiconductor measurement technologies. With a strong foundation of patents and collaborative innovations, his contributions are vital in shaping the future of precision measurements in the manufacturing sector.

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