The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2026
Filed:
Dec. 14, 2022
Kla Corporation, Milpitas, CA (US);
Stilian Pandev, Santa Clara, CA (US);
Min-Yeong Moon, Ann Arbor, MI (US);
KLA Corporation, Milpitas, CA (US);
Abstract
A characterization system is disclosed. The system may include one or more controllers including one or more processors configured to execute a set of program instructions stored in memory. The controller may be configured to train a machine learning-based characterization library based on a set of training data. The controller may be configured to generate one or more characterization measurements using the trained machine learning-based characterization library based on the real-time characterization data associated with the one or more samples from the characterization sub-system. The controller may be configured to determine one or more additional characterization measurements based on a non-machine learning-based technique. The controller may be configured to compare the one or more characterization measurements and the one or more additional characterization measurements to monitor a measurement uncertainty of the machine learning-based characterization library.