Location History:
- Okazaki, JP (1993)
- Kawasaki, JP (2001 - 2005)
- Kanagawa, JP (1995 - 2012)
Company Filing History:
9 out of 9 
1 out of 1 
1 out of 441 
Years Active: 1993-2012
Title: Innovations in Semiconductor Surface Treatment by Mikio Takagi
Introduction
Mikio Takagi, a prominent inventor based in Kanagawa, Japan, has made significant contributions to the field of semiconductor technology. With a total of 12 patents to his name, Takagi's work focuses primarily on methods of surface treatment for semiconductors, pushing the boundaries of efficiency and effectiveness in the industry.
Latest Patents
Among his latest innovations, Takagi has developed a method for surface treating semiconductors that involves dry etching a native oxide film on silicon wafers at temperatures of 50°C or less. This is followed by a hydrogen treatment carried out at a temperature of 100°C or more, aiming to bond dangling bonds with hydrogen. The process also incorporates a jig utilized for loading new silicon wafers, ensuring that the wafers undergo removal of the native oxide film before hydrogen bonding. One key feature of this method is the injection of inert gas at temperatures ranging from 0 to -30°C into the reaction vessel after the native oxide film has been removed.
Additionally, Takagi has patented a method for removing native oxide film from contact holes of semiconductor devices using microwave-excited reactive gas. This innovative approach enhances throughput by introducing reactive gas horizontally into a reactor, supported by a chamber designed for higher internal pressure, all while maintaining the semiconductor wafers at an optimal temperature during the process.
Career Highlights
Takagi's remarkable career includes significant stints at F.T.L. Co., Ltd., where he further honed his skills and expertise in semiconductor technologies. His ability to innovate and improve processes has solidified his reputation as a leader in the semiconductor field.
Collaborations
Throughout his career, Mikio Takagi has collaborated with several notable professionals, including Seiichi Takahashi and Hiroaki Inoue. These collaborations have fostered an environment of creativity and technological advancement, contributing to the groundbreaking innovations he has brought to the semiconductor industry.
Conclusion
Mikio Takagi's contributions to semiconductor surface treatment demonstrate his dedication to enhancing technology through innovative solutions. His patents not only reflect his expertise but also promise to shape the future of semiconductor manufacturing. As he continues to push the boundaries of what is possible, Takagi stands out as a key figure in the ongoing evolution of this vital industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.