This inventor holds 16 USPTO granted patents and 3 published patent applications and 1 EPO patent, primarily in Chemical Vapor Deposition. Top assignee: Veeco Instruments Inc.. Active years: 2007-2018.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2007-2018
Areas of Expertise:
Title: Mikhail Belousov: Innovator in Chemical Vapor Deposition Technology
Introduction
Mikhail Belousov is a prominent inventor based in Plainsboro, NJ, known for his significant contributions to the field of chemical vapor deposition technology. With a total of 16 patents to his name, Belousov has made remarkable advancements that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Among his latest patents, Belousov has developed innovative solutions such as the "Chemical vapor deposition flow inlet elements and methods." This patent describes a flow inlet element for a chemical vapor deposition reactor, which consists of multiple elongated tubular elements arranged side-by-side. These elements are designed to eject gas in a downstream direction, optimizing the gas distribution within the reactor. Another notable patent is for "Processing methods and apparatus with temperature distribution control." This invention provides a wafer treatment process that allows for the injection of fill gas into gaps between wafers and the wafer carrier, enabling the control of temperature uniformity during processing.
Career Highlights
Belousov's career is marked by his role at Veeco Instruments Inc., where he has been instrumental in developing cutting-edge technologies that support the semiconductor industry. His work has not only advanced the technical capabilities of chemical vapor deposition but has also contributed to the overall efficiency of wafer processing.
Collaborations
Throughout his career, Belousov has collaborated with talented individuals such as Bojan Mitrovic and Alexander I Gurary. These collaborations have fostered an environment of innovation and have led to the successful development of various technologies in the field.
Conclusion
Mikhail Belousov's contributions to chemical vapor deposition technology exemplify his dedication to innovation and excellence. His patents and work at Veeco Instruments Inc. continue to influence the semiconductor industry, paving the way for future advancements.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile