The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2011
Filed:
Feb. 12, 2009
Dong Seung Lee, Bridgewater, NJ (US);
Mikhail Belousov, Plainsboro, NJ (US);
Eric A. Armour, Pennington, NJ (US);
William E. Quinn, Whitehouse Station, NJ (US);
Dong Seung Lee, Bridgewater, NJ (US);
Mikhail Belousov, Plainsboro, NJ (US);
Eric A. Armour, Pennington, NJ (US);
William E. Quinn, Whitehouse Station, NJ (US);
Veeco Instruments Inc., Plainview, NY (US);
Abstract
An apparatus for performing non-contact material characterization includes a wafer carrier adapted to hold a plurality of substrates and a material characterization device, such as a device for performing photoluminescence spectroscopy. The apparatus is adapted to perform non-contact material characterization on at least a portion of the wafer carrier, including the substrates disposed thereon.