Location History:
- Redwood City, CA (US) (2005)
- Sunnyvale, CA (US) (2021)
Company Filing History:
Years Active: 2005-2021
Title: Innovations by Miguel S. Fung
Introduction
Miguel S. Fung is a notable inventor based in Sunnyvale, CA, who has made significant contributions to the field of materials science and semiconductor processing. With a total of 2 patents, he has developed innovative methods that enhance the efficiency and quality of film stack formation.
Latest Patents
One of his latest patents is titled "Method of forming film stacks with reduced defects." This method involves positioning a substrate on a substrate support within a processing chamber and sequentially depositing polysilicon layers and silicon oxide layers to produce the film stack. The process includes supplying a current of greater than 5 ampere to a plasma profile modulator while generating a deposition plasma, exposing the substrate to this plasma, and maintaining the processing chamber at a pressure between 2 Torr and 100 Torr during the deposition.
Another significant patent is for a "Nitrogen-free dielectric anti-reflective coating and hardmask." This patent outlines methods for depositing a dielectric material that can be used for anti-reflective coatings or hardmasks. The method involves introducing a processing gas comprising a silane-based compound along with oxygen and carbon-containing compounds to the processing chamber, leading to the deposition of a nitrogen-free dielectric material on the substrate.
Career Highlights
Miguel S. Fung is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work focuses on advancing technologies that improve the manufacturing processes of semiconductor devices.
Collaborations
Throughout his career, Miguel has collaborated with talented individuals such as Bok Hoen Kim and Sudha S. Rathi, contributing to various innovative projects and patents.
Conclusion
Miguel S. Fung's contributions to the field of semiconductor processing through his patents demonstrate his commitment to innovation and excellence. His work continues to influence advancements in materials science and technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.