Michael T Savo

Title: Michael T. Savo: Innovator in Semiconductor Technologies

Introduction

Michael T. Savo is an accomplished inventor based in Bethlehem, PA, known for his contributions to the field of materials science and semiconductor technologies. With a total of two patents to his name, Savo has focused on developing methods and materials that enhance the performance of display devices and other electronic applications.

Latest Patents

Savo's latest patents showcase innovative approaches to material deposition and barrier formation. One noteworthy patent describes a novel method for depositing vanadium-containing films, including vanadium nitride and vanadium oxynitride. This method involves several intricate steps: contacting a substrate with vanadium oxytrichloride vapor in a deposition reactor, purging unreacted vapor with inert gas, and introducing a nitrogen-containing reactant, followed by additional purging. Moreover, the process allows for optional plasma treatment of the substrate to eliminate residual oxygen from the oxynitride film.

Another significant patent focuses on barrier materials specifically designed for display devices. This invention outlines apparatus comprising silicon-containing layers and a metal oxide layer, which serve as effective passivation layers. The highlighted apparatus features a transparent metal oxide layer alongside silicon oxide and silicon nitride layers, demonstrating properties such as high density, low hydrogen content, and notable transparency in the UV-visible spectrum.

Career Highlights

Savo has been making strides in the innovation landscape while working at Versum Materials US, LLC, a company renowned for its advanced materials and technologies for semiconductor manufacturing. His expertise and pioneering work continue to impact the industry significantly, paving the way for more efficient electronic devices.

Collaborations

In his professional journey, Michael T. Savo has collaborated with notable colleagues such as Robert Gordon Ridgeway and Andrew David Johnson. These collaborations have likely enriched his research and development endeavors, leading to the successful patenting of his innovative methods and materials.

Conclusion

Michael T. Savo stands out as a key figure in the realm of semiconductor innovation. His inventive spirit is evident through his patents that enhance material properties for electronic applications, contributing to the advancement of display technologies. As he continues his work at Versum Materials, the impact of his inventions is expected to resonate throughout the industry for years to come.