The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2019
Filed:
Mar. 08, 2013
Air Products and Chemicals, Inc., Allentown, PA (US);
Robert Gordon Ridgeway, Quakertown, PA (US);
Andrew David Johnson, Doylestown, PA (US);
Anupama Mallikarjunan, Macungie, PA (US);
Raymond Nicholas Vrtis, Orefield, PA (US);
Xinjian Lei, Vista, CA (US);
Mark Leonard O'Neill, Gilbert, AZ (US);
Manchao Xiao, San Diego, CA (US);
Jianheng Li, Emmaus, PA (US);
Michael T. Savo, Bethlehem, PA (US);
VERSUM MATERIALS US, LLC, Tempe, AZ (US);
Abstract
Described herein are apparatus comprising one or more silicon-containing layers and a metal oxide layer. Also described herein are methods for forming one or more silicon-containing layers to be used, for example, as passivation layers in a display device. In one particular aspect, the apparatus comprises a transparent metal oxide layer, a silicon oxide layer and a silicon nitride layer. In this or other aspects, the apparatus is deposited at a temperature of 350° C. or below. The silicon-containing layers described herein comprise one or more of the following properties: a density of about 1.9 g/cmor greater; a hydrogen content of about 4×10cmor less, and a transparency of about 90% or greater at 400-700 nm as measured by a UV-visible light spectrometer.