Michael J Coughlin

Title: Michael J Coughlin: Innovator in Polishing Technology

Introduction

Michael J Coughlin is a prominent inventor based in Livermore, CA (US). He has made significant contributions to the field of polishing technology, holding a total of 9 patents. His work primarily focuses on improving the efficiency and effectiveness of chemical mechanical polishing systems.

Latest Patents

Coughlin's latest patents include innovative cleaning systems for polishing liquid delivery arms. One notable invention is a polishing liquid delivery arm cleaning tool that features a body designed to be securely attached to the polishing liquid delivery arm of a chemical mechanical polishing system. This tool includes an insert that directs cleaning fluid back to the inner surface of the enclosure of the polishing liquid delivery arm. Another significant patent involves a polishing assembly that incorporates a rotatable platen to support a polishing pad. This assembly features a cleaning fluid delivery mechanism that ensures optimal performance during the polishing process.

Career Highlights

Michael J Coughlin is currently employed at Applied Materials, Inc., where he continues to develop innovative solutions in the polishing technology sector. His expertise and dedication have led to advancements that enhance the efficiency of chemical mechanical polishing systems.

Collaborations

Coughlin has collaborated with notable colleagues, including Allen L D'Ambra and Shantanu Rajiv Gadgil. These partnerships have contributed to the development of cutting-edge technologies in the field.

Conclusion

Michael J Coughlin's contributions to polishing technology through his patents and collaborations highlight his role as an influential inventor. His work continues to shape the industry and improve the performance of polishing systems.