The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2025
Filed:
Jun. 10, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Roy C. Nangoy, Santa Clara, CA (US);
Shantanu Rajiv Gadgil, Santa Clara, CA (US);
Nathan Arron Davis, Gilbert, AZ (US);
Allen L. D'Ambra, Burlingame, CA (US);
Michael J. Coughlin, Livermore, CA (US);
Sumit Subhash Patankar, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A polishing assembly includes a rotatable platen to support a polishing pad, a polishing liquid delivery arm having an enclosure open at a bottom thereof and one or more ports to deliver a polishing liquid and a cleaning fluid downwardly through an interior space of the enclosure onto the polishing pad, and a delivery arm cleaning tool removably attached to the polishing liquid delivery arm, the cleaning tool extending below the delivery arm and having a delivery arm-facing surface shaped such that the cleaning tool directs the cleaning fluid from the polishing liquid delivery arm on to a surface of the enclosure of the polishing liquid delivery arm.