The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2023
Filed:
Jun. 24, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Shantanu Rajiv Gadgil, Santa Clara, CA (US);
Sumit Subhash Patankar, Fremont, CA (US);
Nathan Arron Davis, Gilbert, AZ (US);
Michael J. Coughlin, Livermore, CA (US);
Allen L. D'Ambra, Burlingame, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 53/017 (2012.01);
U.S. Cl.
CPC ...
B24B 53/017 (2013.01);
Abstract
A method of cleaning a conditioner head includes bringing two clamps of a cleaning tool inward toward a disk-shaped pad conditioner head to press a sponge against an outer surface of the disk-shaped pad conditioner head, and creating relative motion between the cleaning tool and the pad conditioner head to wipe the sponge against the pad conditioner head.