The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2025
Filed:
Mar. 06, 2024
Applied Materials, Inc., Santa Clara, CA (US);
Roy C. Nangoy, Santa Clara, CA (US);
Shantanu Rajiv Gadgil, Santa Clara, CA (US);
Nathan Arron Davis, Gilbert, AZ (US);
Allen L. D'Ambra, Burlingame, CA (US);
Michael J. Coughlin, Livermore, CA (US);
Sumit Subhash Patankar, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A polishing liquid delivery arm cleaning tool includes a body configured to be removably secured to a polishing liquid delivery arm of a chemical mechanical polishing system, and an insert removably secured to the body. The insert has an arm-facing surface shaped to direct a cleaning fluid from the polishing liquid delivery arm back to an inner surface of an enclosure of the polishing liquid delivery arm.