The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2022
Filed:
Mar. 09, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Shantanu Rajiv Gadgil, Santa Clara, CA (US);
Sumit Subhash Patankar, Fremont, CA (US);
Nathan Arron Davis, Gilbert, AZ (US);
Michael J. Coughlin, Livermore, CA (US);
Allen L. D'Ambra, Burlingame, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Chemically impregnated applicators used to provide hydrophobic surfaces on chemical mechanical polishing system components and related application methods. A method of forming a hydrophobic coating on a surface of a polishing system component includes cleaning the surface of the polishing system component to remove a polishing fluid residue therefrom and applying a hydrophobicity causing chemical solution to the surface of the polishing system component.