Michael A Miller

Title: **Michael A. Miller: A Trailblazer in Plasma Technology and Print Gap Control**

Introduction

Michael A. Miller, based in Mountain View, CA, is a prolific inventor with an impressive portfolio of 35 patents. His innovative work primarily focuses on advanced plasma technologies and print gap control systems, making significant contributions to fields such as semiconductor manufacturing and organic light-emitting devices (OLEDs).

Latest Patents

Among his latest patents is the groundbreaking development of a **Self-ionized and inductively-coupled plasma for sputtering and resputtering**. This invention details a magnetron sputter reactor designed to deposit materials like tantalum, tantalum nitride, and copper. It promotes self-ionized plasma (SIP) and inductively coupled plasma (ICP) sputtering methods, facilitating enhanced layer coverage and material application through innovative chamber configurations. His approach leverages a small magnetron with unequal magnetic strength and RF coils that optimally inductively couple RF energy into plasma for efficient processing.

Additionally, he has developed an **Apparatus and method for control of print gap**. This patent outlines gas bearing systems capable of achieving precise print gap control for various inkjet and thermal printing applications, which can be crucial for the manufacturing of OLEDs. By employing pressurized gas and vacuum systems, as well as flexible fluid channel designs, this invention showcases versatility in accommodating different print module packages.

Career Highlights

Michael's career includes significant roles at renowned companies such as Intermolecular, Inc. and Applied Materials, Inc., where he honed his expertise in innovation and product development. His work has placed him at the forefront of technological advancements in the semiconductor and printing industries.

Collaborations

Throughout his career, Michael has collaborated with notable professionals, including Prashant B. Phatak and Tony P. Chiang. These collaborations have enriched the development and execution of pioneering technologies, enhancing their respective contributions to the industry.

Conclusion

Michael A. Miller continues to be a distinguished figure in the realm of inventions and patents. His contributions to plasma technology and print gap control not only highlight his inventive spirit but also pave the way for future advancements in manufacturing processes. With each new patent, he reinforces the importance of innovation in technology and its endless potential to reshape the industry landscape.