Meng-Hsien Li

Title: Innovations of Meng-Hsien Li in Semiconductor Technology

Introduction

Meng-Hsien Li is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His work focuses on innovative methods for forming semiconductor devices, which are crucial for the advancement of electronic components.

Latest Patents

One of Meng-Hsien Li's latest patents is titled "Method of forming semiconductor device using wet etching chemistry." This patent describes a wet etching chemistry designed to selectively remove polymer residue on an opening embedded in a low-k dielectric layer and an underlying stop layer during the formation of an interconnect structure. The wet etching chemistry includes two types of organic solvents, with a concentration of at least 70%, an alkali source amine that includes a tertiary amine, an inhibitor, and water. Notably, this chemistry is free of peroxide to prevent damage to the WdC hard mask.

Another significant patent is "Semiconductor structure and method for forming the same." This invention outlines a semiconductor structure that consists of a semiconductor substrate, a dielectric layer, a tungsten plug, a conductive plug, and a contact barrier. The dielectric layer is positioned over the semiconductor substrate, with the tungsten plug embedded within it. The conductive plug is situated on the tungsten plug, and the contact barrier features a sidewall barrier on the sidewall of the conductive plug, along with a bottom barrier between the conductive plug and the tungsten plug. The thickness of the sidewall barrier exceeds that of the bottom barrier, enhancing the overall structure.

Career Highlights

Meng-Hsien Li is currently employed at Taiwan Semiconductor Manufacturing Company Ltd., a leading firm in the semiconductor industry. His expertise and innovative approaches have contributed to the company's reputation for excellence in semiconductor manufacturing.

Collaborations

Meng-Hsien Li has collaborated with notable colleagues, including Kuo-Bin Huang and Li-min Chen. Their combined efforts in research and development have further advanced the field of semiconductor technology.

Conclusion

Meng-Hsien Li's contributions to semiconductor technology through his innovative patents and collaborations highlight his importance in the industry. His work continues to influence the development of advanced electronic components, showcasing the vital role of inventors in technological progress.