Megan Carruth

Title: Innovations by Inventor Megan Carruth

Introduction

Megan Carruth is a notable inventor based in Austin, Texas, recognized for her contributions to plasma processing technology. With two patents to her name, she has made significant advancements in the field, showcasing her expertise and innovative spirit.

Latest Patents

Megan's latest patents include an "Apparatuses and methods for plasma processing" and an "Ion angle detector." The plasma processing patent describes a method that involves generating electrons in a source chamber and creating an electric potential gradient to accelerate these electrons into a processing chamber. This process leads to the generation of an electron-beam sustained plasma (ESP). The ion angle detector patent outlines a measurement system that includes a detector and an ion current meter, designed to provide signals based on measurements from an ion current collector. This innovative design features an ion angle selection grid with specific dimensions to enhance measurement accuracy.

Career Highlights

Megan Carruth works at Tokyo Electron Limited, a company known for its cutting-edge technology in the semiconductor industry. Her role involves developing advanced plasma processing techniques that are crucial for manufacturing semiconductor devices. Her work has positioned her as a key player in the field, contributing to the ongoing evolution of technology.

Collaborations

Megan collaborates with talented individuals such as Zhiying Chen and Joel Blakeney, who share her passion for innovation and technology. Together, they work on projects that push the boundaries of what is possible in plasma processing.

Conclusion

Megan Carruth's contributions to plasma processing technology through her patents and work at Tokyo Electron Limited highlight her as a significant figure in the field of innovation. Her dedication to advancing technology continues to inspire others in the industry.