The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2026
Filed:
Oct. 19, 2023
Tokyo Electron Limited, Tokyo, JP;
Zhiying Chen, Austin, TX (US);
Megan Carruth, Austin, TX (US);
Joel Blakeney, Austin, TX (US);
Shyam Sridhar, Austin, TX (US);
Peter Lowell George Ventzek, Austin, TX (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
A detector for a plasma measurement system, where the detector includes an insulating substrate including a cavity; a conductive plate spanning an entrance to the cavity; a first aperture through the conductive plate; an iris diaphragm including movable blades around a second aperture, the second aperture being aligned to the first aperture; an ion current collector disposed in the cavity, the iris diaphragm being disposed between the ion current collector and the conductive plate; and a rotatable gear coupled to the movable blades of the iris diaphragm.