Miyagi, Japan

Masaya Kawamata


Average Co-Inventor Count = 3.0

ph-index = 3

Forward Citations = 39(Granted Patents)


Company Filing History:


Years Active: 2015-2018

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6 patents (USPTO):

Title: The Innovative Contributions of Masaya Kawamata

Introduction

Masaya Kawamata, an accomplished inventor based in Miyagi, Japan, is known for his significant contributions to plasma processing technology. With six patents to his name, Kawamata is a key figure in advancing methods that enhance the efficiency and effectiveness of semiconductor manufacturing.

Latest Patents

Kawamata's recent patents showcase his innovative approaches in plasma etching. One of his notable inventions is the "Plasma Etching Method and Plasma Etching Apparatus," which introduces a unique process for holding a substrate and supplying processing gas to convert it into plasma. This method involves meticulously controlling the supply conditions across multiple supply parts, thereby enhancing precision in plasma-based applications.

Another significant patent of his is the "Method of Processing Target Object and Plasma Processing Apparatus." This technique focuses on exposing a resist mask to active species of hydrogen within a processing vessel while the target object is mounted on a table. The subsequent etching of a hard mask layer utilizes excited plasma, signifying a sophisticated level of control in the plasma etching process.

Career Highlights

Kawamata is employed at Tokyo Electron Limited, a leading company in the development of semiconductor manufacturing equipment. His work here has positioned him at the forefront of innovation in plasma etching technologies, marking him as a valuable contributor to the field.

Collaborations

Throughout his career, Kawamata has collaborated with esteemed colleagues, including Masanobu Honda and Kazuhiro Kubota. These partnerships have likely enriched his inventive processes, fostering an environment of creativity and shared expertise that drives advancements in technology.

Conclusion

Masaya Kawamata stands out as a prominent inventor in the semiconductor industry, with his innovative patents paving the way for enhanced plasma processing techniques. His work not only reflects his expertise but also contributes significantly to the evolution of manufacturing technologies in Japan and beyond.

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