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For the Inventor, By the Inventor

Utsunomiya, Japan

Masami Yonekawa

USPTO Granted Patents = 20 

Average Co-Inventor Count = 1.6

ph-index = 7

Forward Citations = 113(Granted Patents)


Location History:

  • Atsugi, JP (1993)
  • Yokohama, JP (1999)
  • Tsukuba, JP (2014)
  • Utsunomiya, JP (1997 - 2023)

Company Filing History:

goldMedal20 out of 90,756 
 
Canon Kabushiki Kaisha
 patents

Years Active: 1993-2025

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20 patents (USPTO):Explore Patents
1. 12292368 - Evaluation method, substrate processing apparatus, manufacturing method of substrate processing apparatus and article manufacturing method (2025-05-06),
2. 12157150 - Particle removal method, particle removal apparatus, and method for manufacturing article (2024-12-03),
3. 11798818 - Container, processing apparatus, particle removing method, and method of manufacturing article (2023-10-24),
4. 11036149 - Imprint apparatus, method of operating the same, and method of manufacturing article (2021-06-15),
5. 10889052 - Imprint apparatus, method for manufacturing article, and exposure apparatus (2021-01-12),
6. 10444646 - Lithography apparatus and method of manufacturing article (2019-10-15),
7. 10228624 - Lithography apparatus and article manufacturing method (2019-03-12),
8. 9213231 - Reflective original, exposure method, and device manufacturing method (2015-12-15),
9. 8814970 - Trapping device that traps particles in vacuum atmosphere (2014-08-26),
10. 7911588 - Exposure apparatus and original (2011-03-22),
11. 7670754 - Exposure apparatus having a processing chamber, a vacuum chamber and first and second load lock chambers (2010-03-02),
12. 7319507 - Apparatus and method for removing contaminant on original, method of manufacturing device, and original (2008-01-15),
13. 7193682 - Exposure apparatus and device manufacturing method (2007-03-20),
14. 6741328 - Exposure apparatus and its control method, stage apparatus, and device manufacturing method (2004-05-25),
15. 6433351 - Exposure apparatus and control method for correcting an exposure optical system on the basis of an estimated magnification variation (2002-08-13),

Title: Innovations by Masami Yonekawa: Pioneering Particle Removal Technologies

Introduction: Masami Yonekawa, based in Utsunomiya, Japan, is a prolific inventor with a remarkable portfolio of 19 patents. His contributions to the field of particle removal technologies showcase his commitment to enhancing industrial processes. Working at Canon Kabushiki Kaisha, Yonekawa's inventions are at the forefront of innovation in substrate processing.

Latest Patents: Yonekawa's latest patents include advanced methods and apparatuses for particle removal. One notable invention is a particle removal method and apparatus that efficiently removes particles from a substrate. This method involves curing a curable composition on a substrate while in contact with a member. Once cured, the member is separated, allowing both the curable composition and any adhered particles to be effectively removed.

Another significant patent under his name presents a container and processing apparatus designed to streamline particle removal. This invention features a charging unit that can charge a stored plate, integrating a contactor that applies electric charges, thus enhancing the efficiency of the particle removal process.

Career Highlights: During his tenure at Canon Kabushiki Kaisha, Yonekawa has established himself as a key contributor to the company's research and development initiatives. His focus on innovative solutions in particle removal positions him as a leading figure in this specialized industry.

Collaborations: Yonekawa collaborates closely with colleagues Yasuyuki Unno and Seiji Orii, contributing to a collaborative environment that fosters creativity and innovation. Their combined expertise enhances the development of cutting-edge technologies and solutions within the company.

Conclusion: Masami Yonekawa's innovative work in particle removal technologies exemplifies the critical role of inventors in advancing industrial processes. His patents not only reflect his dedication to innovation but also serve as valuable assets to Canon Kabushiki Kaisha. As he continues to develop novel solutions, the impact of his work will undoubtedly resonate within the industry for years to come.

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