The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2014
Filed:
Feb. 03, 2011
Applicant:
Masami Yonekawa, Tsukuba, JP;
Inventor:
Masami Yonekawa, Tsukuba, JP;
Assignee:
Canon Kabushiki Kaisha, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 59/50 (2006.01); B01D 45/08 (2006.01); B08B 5/04 (2006.01);
U.S. Cl.
CPC ...
B01D 45/08 (2013.01); B08B 5/04 (2013.01);
Abstract
A trapping device that traps a particle in a vacuum atmosphere includes a plurality of grooves arrayed on a surface of the trapping device. Each of the plurality of grooves has a shape that is obtained by replacing a bottom part of a U-groove is replaced with a V-groove.