Location History:
- Hiki-gun, JP (2002)
- Hachioji, JP (2004 - 2007)
- Sayama, JP (2007 - 2014)
- Tokyo, JP (2016 - 2022)
Company Filing History:
12 out of 2,874 
9 out of 42,517 
5 out of 1,146 
Years Active: 2002-2022
Title: **Masaki Hasegawa: Innovator in Electron Beam Technology**
Introduction
Masaki Hasegawa, a distinguished inventor based in Sayama, Japan, holds an impressive portfolio of 26 patents. His groundbreaking work in the field of electron beam devices and wafer inspection technology significantly contributes to advancements in various industrial processes.
Latest Patents
Hasegawa's recent patents demonstrate his commitment to innovation. One of his prominent inventions is an **electron beam device** designed to enhance the sharpening of photoelectron images for adjusting irradiation optical systems. This device features a dual-column structure with both an irradiation optical system and an imaging optical system, enhancing the precision of electron beam application on samples. It also includes a light irradiation unit that emits ultraviolet rays and employs a negative voltage to optimize electron orbit before it interacts with the sample. Additionally, Hasegawa developed a **wafer inspection apparatus and method** that effectively addresses image quality degradation when observing wafers with height variations. This technology ensures optimal image acquisition by adjusting the focal point of an observation optical system based on real-time measurements of wafer surface heights.
Career Highlights
Hasegawa's career encompasses significant tenures at renowned companies, notably Hitachi High Technologies Corporation and Hitachi, Ltd. His contributions to these organizations have been pivotal in pioneering new developments in electron beam applications and semiconductor manufacturing processes.
Collaborations
Throughout his career, Hasegawa has collaborated with esteemed colleagues, including Hisaya Murakoshi and Tomohiko Ogata. These partnerships have fostered a collaborative environment, driving forward multiple innovations in his field of expertise.
Conclusion
Masaki Hasegawa's remarkable achievements and ongoing contributions reflect his dedication to innovation within electron beam technology and wafer inspection methods. Through his extensive patent portfolio, he continues to influence advancements in production and quality control across the semiconductor industry.