The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2021
Filed:
Mar. 16, 2016
Hitachi High-tech Corporation, Tokyo, JP;
Masaki Hasegawa, Tokyo, JP;
Katsunori Onuki, Tokyo, JP;
Noriyuki Kaneoka, Tokyo, JP;
Hisaya Murakoshi, Tokyo, JP;
Tomohiko Ogata, Tokyo, JP;
Hitachi High-Tech Corporation, Tokyo, JP;
Abstract
A defect inspection device includes a sample support member, a negative voltage, an imaging element, an ultraviolet light source, a movement stage, and a control device. The control device controls the movement stage such that a portion of a linear part included in the image or a location on an extensional line of the linear part is positioned at a specific location in an irradiated region of the electron beam. The control device also repeats the control of the movement stage until an end of the linear part is positioned within the irradiated region of the electron beam.