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For the Inventor, By the Inventor

Yamanashi, Japan

Masahiro Numakura

USPTO Granted Patents = 14 

Average Co-Inventor Count = 1.9

ph-index = 3

Forward Citations = 546(Granted Patents)


Location History:

  • Miyagi-ken, JP (2008)
  • Nirasaki, JP (2013)
  • Yamanashi, JP (2010 - 2014)
  • Miyagi-gun, JP (2008 - 2016)
  • Miyagi, JP (2017 - 2023)

Company Filing History:

goldMedal14 out of 10,295 
 
Tokyo Electron Limited
 patents

Years Active: 2008-2025

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14 patents (USPTO):
1. 12444632 - System of processing substrate, transfer method, transfer program, and holder (2025-10-14),
2. 11735448 - Container, container partition plate, substrate processing system, and substrate transfer method (2023-08-22),
3. 9824861 - Substrate processing apparatus, substrate processing method and recording medium recording substrate processing program (2017-11-21),
4. 9305814 - Method of inspecting substrate processing apparatus and storage medium storing inspection program for executing the method (2016-04-05),
5. 8731698 - Substrate receiving method and controller (2014-05-20),
6. 8571703 - System, method and storage medium for controlling a processing system (2013-10-29),
7. 8452455 - Control device and control method of plasma processing system, and storage medium storing control program (2013-05-28),
8. 8382910 - Cleaning method for substrate processing system, storage medium, and substrate processing system (2013-02-26),
9. 8145339 - Substrate processing apparatus and substrate transfer method adopted therein (2012-03-27),
10. 8055378 - Device for controlling processing system, method for controlling processing system and computer-readable storage medium stored processing program (2011-11-08),
11. 7738987 - Device and method for controlling substrate processing apparatus (2010-06-15),
12. 7640072 - Substrate processing apparatus, control method for the apparatus, and program for implementing the method (2009-12-29),
13. 7455747 - Substrate processing apparatus, control method for the apparatus, and program for implementing the method (2008-11-25),
14. 7367769 - Semiconductor production system, cluster tool, control method of semiconductor production system and maintenance method of cluster tool (2008-05-06),

Title: Masahiro Numakura: Innovator in Substrate Processing Technology

Introduction

Masahiro Numakura is a prominent inventor based in Yamanashi, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 14 patents. His work focuses on developing advanced systems and methods that enhance the efficiency and effectiveness of substrate processing.

Latest Patents

Numakura's latest patents include a system for processing substrates, which features an atmospheric-pressure transfer chamber, multiple vacuum processing chambers, and load-lock modules. This innovative system allows for the concurrent transfer of used consumables from detachable containers to the vacuum processing chamber. Another notable patent involves a container designed for consumables, which includes multiple holding portions and a partition plate to facilitate the loading and unloading of consumables efficiently.

Career Highlights

Throughout his career, Numakura has been associated with Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has significantly impacted the development of substrate processing systems, making them more efficient and reliable.

Collaborations

Numakura has collaborated with notable coworkers such as Hiroaki Mochizuki and Noriaki Shimizu. Their combined expertise has contributed to the advancement of substrate processing technologies.

Conclusion

Masahiro Numakura's innovative work in substrate processing technology has led to numerous patents that enhance the efficiency of manufacturing processes. His contributions continue to shape the future of the semiconductor industry.

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