The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 22, 2023

Filed:

Mar. 05, 2020
Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Toshiaki Toyomaki, Miyagi, JP;

Seiichi Kaise, Miyagi, JP;

Masahiro Numakura, Miyagi, JP;

Yuki Takeyama, Miyagi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/673 (2006.01); H01L 21/687 (2006.01); B65G 47/90 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6732 (2013.01); B65G 47/90 (2013.01); H01L 21/67167 (2013.01); H01L 21/67265 (2013.01); H01L 21/68707 (2013.01);
Abstract

A container for consumables includes multiple holding portions, a partition plate and a fixer. The multiple holding portions are configured to respectively accommodate the consumables, each of which is loaded into and unloaded from one direction. The partition plate includes a first portion formed to be disposed between a light emitting part and a light receiving part of a detector, and the partition plate is accommodated in one of the multiple holding portions. The fixer is configured to fix the container so that the consumables are arranged on a transfer path to be loaded into and unloaded from the multiple holding portions.


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