The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2008
Filed:
Mar. 18, 2002
Applicants:
Tomoyuki Ishii, Nirasaki, JP;
Masahiro Numakura, Miyagi-ken, JP;
Inventors:
Tomoyuki Ishii, Nirasaki, JP;
Masahiro Numakura, Miyagi-ken, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); G06F 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
PS control sections MC, MCconfigured to independently control the operations in process ships PS, PSare provided respectively, and an LM control section MCconfigured to control the operation in a loader module LM is provided independently. With this structure, the operations of the process ships PS, PSand the loader module LM can be checked while the process ships PS, PSare not coupled to the loader module LM.