Masahiko Doki

Title: Masahiko Doki: Innovator in Semiconductor Technology

Introduction

Masahiko Doki is a prominent inventor based in Sagamihara, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 10 patents. His work focuses on methods that enhance the manufacturing processes of semiconductor devices.

Latest Patents

One of Doki's latest patents is a method of making a semiconductor device that involves several key steps. This method includes forming a wiring pattern by dry etching a wiring layer on a semiconductor substrate, using a resist pattern as a mask. The wiring pattern is then immersed in an amine-containing liquid to remove deposition residues formed during the dry etching process. Following this, the wiring pattern is processed with a fluid that does not contain amine and is capable of removing deposition residues. A conformal insulating layer is then formed on the processed wiring pattern, followed by an insulating layer with a planarizing function created through chemical vapor deposition (CVD). This innovative method is particularly suitable for multi-layer wiring, allowing for the formation of an interlayer insulating film with a satisfactory planarizing function.

Another notable patent by Doki is focused on forming a multilayer insulating film of a semiconductor device. In this method, the distributed quantity of carbon or fluorine is maximized at the interface between insulating films. The concentration of carbon present at the interface is maintained at 1.times.10.sup.20 atoms/cm.sup.3 or more, which is crucial for the performance of the semiconductor device.

Career Highlights

Throughout his career, Masahiko Doki has worked with leading companies in the technology sector, including Fujitsu Corporation and Fuji Electric Co., Ltd. His expertise in semiconductor technology has made him a valuable asset in these organizations.

Collaborations

Doki has collaborated with notable colleagues such as Yuji Furumura and Kiyoshi Ooiwa, contributing to advancements in semiconductor manufacturing techniques.

Conclusion

Masahiko Doki's innovative work in semiconductor technology has led to significant advancements in the field. His patents reflect a deep understanding of the complexities involved in semiconductor manufacturing, making him a key figure in this industry.