Company Filing History:
Years Active: 2018-2025
Title: **The Innovative Mind of Martin Hermann**
Introduction
Martin Hermann is a distinguished inventor based in Heidenheim, Germany. With a total of four patents to his name, he has made significant contributions to the field of optical elements, particularly in the advanced technology of extreme ultraviolet (EUV) lithography. His work has proven to be pivotal in enhancing the efficiency and performance of optical systems used in various high-tech applications.
Latest Patents
Among Martin Hermann’s latest innovations is a method for treating a reflective optical element specifically designed for the EUV wavelength range. This method, along with the related production techniques and treating apparatus, outlines a sophisticated process whereby a reflective optical element, coated on a substrate, is subjected to radiation pulses. The duration of these radiation pulses ranges from 1 microsecond to 1 second, while the reflective optical element and the radiation source move in relative motion. This innovative approach is particularly suited for EUV lithography and the inspection of masks or wafers, catering to the increasing demands of the semiconductor industry.
Another notable patent involves a mirror element tailored for microlithographic projection exposure apparatuses. This patent focuses on a substrate and a layer stack featuring a reflection layer system. A unique characteristic of this mirror element is its ability to maintain a specific curvature based on predetermined operational temperatures, ensuring the curvature remains stable within a 10% variation over a temperature interval of at least 10 K. This technology is crucial for maintaining accuracy in high-precision lithography processes.
Career Highlights
Martin Hermann is currently affiliated with Carl Zeiss SMT GmbH, a leader in the development of advanced optical systems. His role at the company allows him to push the boundaries of innovation, aligning with the organization's commitment to enhancing optical technologies for a range of industries. His work demonstrates a blend of theoretical understanding and practical application that fuels advancements in the field.
Collaborations
Throughout his career, Martin has collaborated with talented professionals, including Oliver Dier and Peter Vogt. These partnerships foster a productive environment where ideas can be exchanged and refined, ultimately leading to groundbreaking inventions that address the complexities of modern technological challenges.
Conclusion
Martin Hermann's contributions to the realm of optical elements exemplify the spirit of innovation. With his cutting-edge patents and collaborations, he continues to play a significant role in advancing EUV lithography and related technologies. His work not only pushes forward the capabilities of optical systems but also significantly impacts various industries, paving the way for future inventions and developments in precision technology.