Location History:
- Nirasaki, JP (2005 - 2007)
- Kumamoto, JP (2004 - 2009)
- Aichi, JP (2011)
Company Filing History:
Years Active: 2004-2011
Title: Manabu Hama: Innovator in Substrate Processing Technology
Introduction
Manabu Hama is a notable inventor based in Kumamoto, Japan. He has made significant contributions to the field of substrate processing, holding a total of 5 patents. His work focuses on enhancing the efficiency and effectiveness of substrate processing apparatuses and methods.
Latest Patents
One of Hama's latest patents is a substrate processing apparatus and method. This apparatus is designed to radiate UV rays onto a target film formed on a substrate's surface, facilitating a curing process. The apparatus features a hot plate that heats the substrate to a predetermined temperature, along with multiple support pins that hold the substrate in place. Additionally, a UV radiating device is included to ensure effective curing. The design of the support pins allows for optimal thermal conductivity, while the hot plate is engineered to absorb the heat conducted through these pins.
Another significant patent by Hama is a reduced-pressure drying unit and coating film forming method. This invention includes a hermetic container with a substrate mount and a vacuum exhauster. The current member and its raising and lowering mechanism control the liquid flow of the coating solution on the substrate, thereby ensuring uniform film thickness.
Career Highlights
Manabu Hama is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His innovative work has positioned him as a key figure in the development of advanced substrate processing technologies.
Collaborations
Hama collaborates with talented coworkers, including Takahiro Kitano and Shinichi Sugimoto. Their combined expertise contributes to the advancement of technology in their field.
Conclusion
Manabu Hama's contributions to substrate processing technology demonstrate his commitment to innovation and excellence. His patents reflect a deep understanding of the complexities involved in substrate processing, making him a valuable asset to Tokyo Electron Limited and the broader technological community.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.