Scottsdale, AZ, United States of America

Mamoru Tomozane


Average Co-Inventor Count = 2.4

ph-index = 4

Forward Citations = 65(Granted Patents)


Company Filing History:


Years Active: 1991-1994

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4 patents (USPTO):Explore Patents

Title: Mamoru Tomozane: Innovator in Semiconductor Technology

Introduction

Mamoru Tomozane is a notable inventor based in Scottsdale, AZ, who has made significant contributions to the field of semiconductor technology. With a total of four patents to his name, he has developed innovative methods that enhance the performance and reliability of semiconductor structures.

Latest Patents

One of his latest patents is titled "Method of forming a SIMOX structure." This invention focuses on creating a SIMOX structure with a reduced number of defects through a two-step anneal process. The first step involves a conventional anneal that densifies the buried oxide layer, making it less reactive with hydrogen. The second step, an H₂/Si anneal, forms a quasi-equilibrium at the surface of the semiconductor layer, minimizing silicon surface etching and allowing for the dissolution of oxide precipitates. Another significant patent is "Non-silicon and silicon bonded structure and method of manufacture." This invention describes a method for bonding a non-silicon substrate to a silicon substrate using a stress-relief layer. This layer mitigates the stress caused by differing thermal expansion coefficients between the two materials, ensuring a more stable bond.

Career Highlights

Mamoru Tomozane is currently employed at Motorola Corporation, where he continues to push the boundaries of semiconductor technology. His work has been instrumental in developing methods that improve the efficiency and effectiveness of semiconductor devices.

Collaborations

Throughout his career, Tomozane has collaborated with esteemed colleagues such as H Ming Liaw and Bertrand Francis Cambou. These partnerships have fostered an environment of innovation and have contributed to the advancement of semiconductor technologies.

Conclusion

Mamoru Tomozane's contributions to semiconductor technology through his patents and collaborations highlight his role as a leading inventor in the field. His innovative methods continue to influence the development of advanced semiconductor structures.

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