Koshi, Japan

Makoto Hayakawa


 

Average Co-Inventor Count = 2.5

ph-index = 2

Forward Citations = 27(Granted Patents)


Company Filing History:


Years Active: 2010-2022

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12 patents (USPTO):Explore Patents

Title: The Innovative Contributions of Makoto Hayakawa

Introduction

Makoto Hayakawa is a prominent inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing, holding a total of 12 patents. His work focuses on improving the efficiency and effectiveness of substrate treatment systems.

Latest Patents

Hayakawa's latest patents include a substrate inspection method, a substrate treatment system, and a computer storage medium. The substrate inspection method involves imaging the surface of a substrate before treatment to acquire a first substrate image. It extracts a predetermined feature amount from this image and selects an inspection recipe based on the extracted feature. After treatment, a second substrate image is acquired to determine the presence of defects. His optical processing apparatus features a housing, a stage, and a light irradiation unit that emits light to form a strip-like irradiation area. This innovative design allows for precise control during the substrate processing.

Career Highlights

Hayakawa has built a successful career at Tokyo Electron Limited, where he has been instrumental in developing advanced technologies for substrate processing. His expertise in imaging and optical processing has positioned him as a leader in his field.

Collaborations

Some of his notable coworkers include Hiroshi Tomita and Tatsuhei Yoshida, who have collaborated with him on various projects within the company.

Conclusion

Makoto Hayakawa's contributions to substrate processing technology have had a significant impact on the industry. His innovative patents and dedication to research continue to drive advancements in this critical area.

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