The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2015
Filed:
May. 29, 2012
Kazuya Hisano, Koshi, JP;
Hiroshi Tomita, Koshi, JP;
Norihisa Koga, Koshi, JP;
Tadashi Nishiyama, Koshi, JP;
Makoto Hayakawa, Koshi, JP;
Kazuya Hisano, Koshi, JP;
Hiroshi Tomita, Koshi, JP;
Norihisa Koga, Koshi, JP;
Tadashi Nishiyama, Koshi, JP;
Makoto Hayakawa, Koshi, JP;
Tokyo Electron Limited, Minato-Ku, JP;
Abstract
In one embodiment, a substrate inspection apparatus performs, in its maintenance mode, operations including: guiding a light emitted from an illuminating unit to an imaging device via a light-guiding member disposed in a casing; judging whether or not a level of a brightness signal obtained by the imaging device falls within a predetermined allowable range when a light emitted from the illuminating unit falls on the imaging device via the light-guiding member; and alarming, if it is judged that the value of the brightness signal is out of the predetermined allowable range, that replacement of the illuminating unit is required.