The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2010
Filed:
Jan. 26, 2007
Makoto Hayakawa, Koshi, JP;
Hiroshi Tomita, Koshi, JP;
Makoto Hayakawa, Koshi, JP;
Hiroshi Tomita, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
In the present invention, an image pickup device moving by drive of a drive unit picks up an image of a substrate on a mounting table. The drive unit is controlled by a driving signal from a first controller. The driving signal outputted to the first controller is outputted also to a second controller, so that the second controller controls the image pickup device based on the driving signal. The movement of the image pickup device itself is synchronized with the image pickup by the image pickup device. According to the present invention, at the time when the mounting table mounting the substrate thereon and the image pickup device are relatively moved to capture the image of the substrate, a precise image without image distortion can be captured for accurate inspection.