Company Filing History:
Years Active: 2022-2025
Title: **Madhu Santosh Kumar Mutyala: Innovator in Substrate Support Systems**
Introduction
Madhu Santosh Kumar Mutyala is a prominent inventor based in Santa Clara, CA, recognized for his significant contributions to the field of semiconductor technology. With a total of six patents to his name, he has demonstrated a commitment to innovation that enhances the functionality and efficiency of substrate support assemblies.
Latest Patents
Among his most recent inventions are two key patents that focus on improvements in substrate support systems. The first patent, titled **Low Impedance Current Path for Edge Non-Uniformity Tuning**, details a novel substrate support assembly. This assembly features an electrostatic chuck body with a substrate support surface characterized by a variety of protrusions. These protrusions are strategically designed to vary in density, creating a superior substrate support environment that enhances edge non-uniformity tuning.
The second patent, **Mesa Height Modulation for Thickness Correction**, further advances the technology by incorporating mechanisms within the substrate support assembly for optimal thickness correction. This innovation includes a chuck body that supports the substrate and introduces a design with an annular groove and/or ridge, housing some of the protrusions for improved performance.
Career Highlights
Currently, Madhu Santosh Kumar Mutyala works for Applied Materials, Inc., a leader in materials engineering solutions for the semiconductor industry. His role there enables him to leverage his inventive skills to contribute to cutting-edge technologies that drive the industry forward.
Collaborations
Throughout his career, Madhu has collaborated with other esteemed professionals in the field, including colleagues such as Deenesh Padhi and Sanjay G Kamath. These collaborations have fostered an environment of innovation, where ideas can be shared and developed into impactful technologies.
Conclusion
Madhu Santosh Kumar Mutyala's patents represent his dedication to advancing substrate support systems, showcasing his ability to solve complex challenges within the semiconductor industry. His work at Applied Materials, Inc. and partnerships with industry professionals underscore his role as a key inventor driving innovation in technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.