Location History:
- Leuven, BE (2014 - 2016)
- Somerville, MA (US) (2012 - 2019)
Company Filing History:
Years Active: 2012-2019
Title: Luis Fernandez: Pioneering Innovations in Microelectronics
Introduction
Luis Fernandez, based in Somerville, MA, is an accomplished inventor with a remarkable portfolio of six patents. His innovative work primarily focuses on advancements in microelectronics processing systems, showcasing his contributions to the field through transformative inventions.
Latest Patents
Among his latest patents, Fernandez developed a "Method for high throughput using beam scan size and beam position in gas cluster ion beam processing system." This invention describes a sophisticated system and method for performing location-specific processing of microelectronic workpieces. The method entails placing a microelectronic workpiece within a beam processing system, selecting a suitably sized beam scan pattern, and employing a processing beam to irradiate a target region of the microelectronic workpiece.
Another significant patent is the "Gas cluster ion beam etching process for etching Si-containing, Ge-containing, and metal-containing materials." This innovation outlines a method and system for executing gas cluster ion beam (GCIB) etch processing tailored for various materials. The process includes defining multiple GCIB properties to meet targeted etch process metrics effectively while utilizing Si-containing and Ge-containing etchants to facilitate the etching of diverse materials.
Career Highlights
Throughout his career, Luis Fernandez has worked with renowned companies such as Tel Epion Corporation and Tokyo Electron Limited, contributing his expertise in microelectronics and processing technologies. His experiences at these prominent companies have significantly shaped his career and patently innovative trajectory.
Collaborations
Fernandez has collaborated with notable professionals in the field, including Christopher K. Olsen and Yan Shao. These collaborations have enriched his research endeavors and fostered an environment of innovative thinking and development within the microelectronics processing sector.
Conclusion
Luis Fernandez stands as a beacon of innovation in the field of microelectronics, with a dedication to enhancing processing systems through his patents and inventions. His work continues to impact the industry, reflecting a commitment to technological advancement and collaboration.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.