Company Filing History:
Years Active: 2017-2021
Title: Innovations by Lucy Zhiping Chen
Introduction
Lucy Zhiping Chen is a prominent inventor based in Santa Clara, CA. She has made significant contributions to the field of materials science and engineering, particularly in the area of plasma deposition and electron beam etching processes. With a total of 6 patents to her name, her work has advanced the technology used in semiconductor manufacturing.
Latest Patents
One of her latest patents is titled "Plasma deposition of carbon hardmask." This method involves forming a transparent carbon layer on a substrate by generating an electron beam plasma above the surface of the substrate. The process includes flowing a hydrocarbon-containing gas mixture into a processing chamber and applying RF power to electrodes to create the desired carbon layer. Another notable patent is "Methods and apparatus for electron beam etching process." This invention describes a method of etching a substrate by delivering process gas to a chamber, generating plasma, and bombarding an electrode to emit electrons that etch the substrate.
Career Highlights
Lucy Zhiping Chen is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. Her innovative work has positioned her as a key figure in advancing technologies that are critical for modern electronics.
Collaborations
Throughout her career, Lucy has collaborated with talented individuals such as Yang Yang and Kartik Ramaswamy. These partnerships have fostered an environment of innovation and creativity, leading to groundbreaking advancements in her field.
Conclusion
Lucy Zhiping Chen's contributions to the field of materials science and engineering are noteworthy. Her patents reflect her commitment to innovation and her role in shaping the future of semiconductor technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.