Company Filing History:
Years Active: 2022-2025
Title: **Lisa J. Enman: Pioneering Innovations in Corrosion Resistance and Substrate Etching**
Introduction
Lisa J. Enman is a remarkable inventor based in Sunnyvale, California, known for her significant contributions to the field of materials science. With a total of eight patents to her name, her innovative work focuses on corrosion-resistant technologies and advanced substrate processing techniques, making her a key figure in her industry.
Latest Patents
Among her latest achievements are two patents that exemplify her inventive prowess. The first patent involves a corrosion-resistant film on a chamber component. This invention features a body with a reduced metal surface that exhibits a significantly lower presence of metal oxide compared to untreated surfaces. By utilizing a pulsing method with a reducing alcohol, her process allows for a unique dry atomic layer deposition technique to coat the reduced metal with a corrosion-resistant film, enhancing its durability.
The second patent describes a method for selectively cleaning and etching a substrate. This innovative approach includes forming a protective film selectively within a trench of the substrate, allowing for precise etching without affecting the side walls. With the application of a polymer film and suitable etch chemistry, this method offers a sophisticated solution for substrate manipulation that safeguards different areas from damage during the etching process.
Career Highlights
Lisa J. Enman’s career is closely linked with her role at Applied Materials, Inc., where she plays a vital part in advancing technologies used in semiconductor manufacturing. Her deep understanding of material properties and processing techniques has led her to influence various projects and drive innovation within her team.
Collaborations
Throughout her career, Lisa has collaborated with talented individuals, including notable colleagues such as Mark Joseph Saly and Lakmal Charidu Kalutarage. These collaborations have fostered a culture of creativity and teamwork, allowing them to tackle complex challenges and develop groundbreaking solutions in their field.
Conclusion
In sum, Lisa J. Enman stands out as a pioneering inventor whose work in corrosion-resistant technologies and selective etching methods is shaping the future of materials science. With her impressive portfolio of patents and collaborations, she continues to inspire innovation in her industry and beyond.
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