The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2023
Filed:
Mar. 06, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Yaoling Pan, Santa Clara, CA (US);
Patrick John Tae, Palo Alto, CA (US);
Leonard Tedeschi, San Jose, CA (US);
Jennifer Sun, Santa Clara, CA (US);
Philip Allan Kraus, San Jose, CA (US);
Xiaopu Li, San Jose, CA (US);
Kallol Bera, San Jose, CA (US);
Michael D. Willwerth, Campbell, CA (US);
Albert Barrett Hicks, III, Santa Clara, CA (US);
Lisa J. Enman, Sunnyvale, CA (US);
Mark Joseph Saly, Milpitas, CA (US);
Daniel Thomas McCormick, San Francisco, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments disclosed herein comprise a sensor. In an embodiment, the sensor comprises a substrate having a first surface and a second surface opposite from the first surface. In an embodiment, the sensor further comprises a first electrode over the first surface of the substrate, and a second electrode over the first surface of the substrate and adjacent to the first electrode. In an embodiment, the sensor further comprises a barrier layer over the first electrode and the second electrode.