Linlin Chen

Title: **Innovative Contributions of Linlin Chen in Semiconductor Metallization**

Introduction

Linlin Chen is a prominent inventor based in Plano, TX, with an impressive portfolio comprising 20 patents. Her inventions primarily focus on advanced methods for electrochemically depositing metals on semiconductor workpieces, which play a crucial role in the field of semiconductor manufacturing and materials science.

Latest Patents

Among her latest patents, Linlin has developed an "Apparatus and method for electrochemically depositing metal on a semiconductor workpiece." This process involves the use of an alkaline electrolytic copper bath to enhance metallization techniques. The innovative approach allows for the electroplating of copper onto various layers, providing an excellent conformal copper coating that effectively fills trenches, vias, and other microstructures. The resulting copper layers exhibit low sheet resistance and are suitable for low-temperature annealing.

Another significant patent is the "Plating-rinse-plating process for fabricating copper interconnects," which presents an improved copper electrochemical deposition (ECD) process. After forming the copper seed layer, Linlin's method involves rinsing the surface of the first copper film to prevent preferential growth in dense regions before proceeding with electrochemical deposition. This technique enhances uniformity and performance in semiconductor applications.

Career Highlights

Linlin Chen has worked with several reputable companies throughout her career, notably Semitool, Inc. and Texas Instruments Corporation. Her experience in these organizations has allowed her to contribute to groundbreaking research and development in semiconductor technologies.

Collaborations

Throughout her career, Linlin has collaborated with esteemed colleagues, including Robert W Batz, Jr. and Thomas Lee Ritzdorf. Their joint efforts have led to significant advancements in the field of semiconductor manufacturing, further demonstrating Linlin's ability to work effectively within teams to drive innovation.

Conclusion

Linlin Chen stands out as an influential figure in the realm of semiconductor technologies. Her inventive spirit and commitment to excellence have resulted in twenty patents that not only enhance manufacturing processes but also pave the way for future innovations in the industry. As her work continues to impact the field, Linlin is undoubtedly a key contributor to the advancement of semiconductor engineering.