The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 31, 2005

Filed:

Aug. 16, 2001
Applicants:

Linlin Chen, Plano, TX (US);

Lyndon W. Graham, Hillsboro, OR (US);

Inventors:

LinLin Chen, Plano, TX (US);

Lyndon W. Graham, Hillsboro, OR (US);

Assignee:

Semitool, Inc., Kalispell, MT (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N027/416 ; G01N027/42 ;
U.S. Cl.
CPC ...
Abstract

A method for determining the concentration of an additive X of an electrochemical bath that includes at least one further component Y is set forth. In accordance with the method, a predetermined amount of a starting solution is provided. The starting solution comprises virgin makeup solution that is saturated with the further additive, or forms a mixed solution that is saturated with the further additive when combined with an amount of the electrochemical bath for measurement that is extracted for measurement. A predetermined amount of the extracted electrochemical bath is then added to the predetermined amount of the starting solution to form the mixed solution. At least one electroanalytical measurement cycle it is then executed using the mixed solution and the results of the measurement cycle are compared with a known measurement standard.


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