Location History:
- Fort Collins, CO (US) (2021)
- Danbury, CT (US) (2019 - 2024)
Company Filing History:
Years Active: 2019-2024
Title: Lingyan Song: Innovator in Microelectronic Cleaning Solutions
Introduction
Lingyan Song is a prominent inventor based in Danbury, CT (US), known for her significant contributions to the field of microelectronics. With a total of four patents to her name, she has developed innovative cleaning compositions and processes that enhance the efficiency of microelectronic devices.
Latest Patents
Among her latest patents is a groundbreaking formulation for aqueous and semi-aqueous cleaners designed to remove post-etch residues while ensuring compatibility with tungsten and cobalt. This composition effectively cleans residue materials, including those containing titanium, copper, tungsten, and cobalt, without damaging the interlevel dielectric or metal interconnect materials present on microelectronic devices. Another notable patent focuses on compositions and methods for selectively etching titanium nitride, which are useful for the removal of titanium nitride and photoresist etch residue materials relative to various metal conducting and insulating materials. These removal compositions incorporate at least one oxidant and one etchant, along with corrosion inhibitors to maintain selectivity.
Career Highlights
Lingyan has worked with reputable companies such as Entegris, Inc. and Entegris Asia LLC, where she has applied her expertise in developing advanced cleaning solutions for microelectronics. Her work has significantly impacted the efficiency and reliability of microelectronic devices.
Collaborations
Throughout her career, Lingyan has collaborated with notable professionals, including Emanuel Israel Cooper and Steven Lippy, contributing to the advancement of her innovative projects.
Conclusion
Lingyan Song's contributions to the field of microelectronics through her innovative cleaning solutions demonstrate her expertise and commitment to advancing technology. Her patents reflect a deep understanding of the complexities involved in microelectronic device maintenance and enhancement.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.