The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2019
Filed:
Mar. 04, 2014
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Li-Min Chen, Norwalk, CT (US);
Emanuel I. Cooper, Scarsdale, NY (US);
Steven Lippy, Brookfield, CT (US);
Lingyan Song, Danbury, CT (US);
Chia-Jung Hsu, Hsin-chu, TW;
Sheng-Hung Tu, Hsin-chu, TW;
Chieh Ju Wang, Hsin-chu, TW;
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K 13/00 (2006.01); H01L 21/3213 (2006.01); C23F 1/14 (2006.01); C23F 1/26 (2006.01); C23G 1/02 (2006.01); C09K 13/08 (2006.01); C09K 13/10 (2006.01); G03F 7/42 (2006.01);
U.S. Cl.
CPC ...
C09K 13/00 (2013.01); C09K 13/08 (2013.01); C09K 13/10 (2013.01); C23F 1/14 (2013.01); C23F 1/26 (2013.01); C23G 1/02 (2013.01); G03F 7/423 (2013.01); H01L 21/32134 (2013.01);
Abstract
Semi-aqueous compositions useful for the selective removal of titanium nitride and/or photoresist etch residue materials relative to metal conducting, e.g., tungsten and copper, and insulating materials from a microelectronic device having same thereon. The semi-aqueous compositions contain at least one oxidant, at least one etchant, and at least one organic solvent, may contain various corrosion inhibitors to ensure selectivity.