Location History:
- Stafford, TX (US) (2001 - 2003)
- Redmond, WA (US) (2002 - 2013)
- Morristown, NJ (US) (2014)
Company Filing History:
Years Active: 2001-2014
Title: Lianzhong Yu: Pioneer Innovator in MEMS Technology
Introduction
Lianzhong Yu is a prominent inventor based in Redmond, WA, known for his groundbreaking work in microelectromechanical systems (MEMS). With a total of 17 patents to his name, Yu's contributions significantly advance sensor technology and fabrication methods in the semiconductor industry.
Latest Patents
One of Lianzhong Yu's latest patents is focused on a wafer level packaged MEMS device. This invention describes an apparatus and method for sensor architecture that utilizes bulk machining of silicon wafers and fusion bond joining. The outcome is a nearly all-silicon, hermetically sealed MEMS device, which integrates a device sensor mechanism formed in an active semiconductor layer, separated from a handle layer by a dielectric layer. Its innovative design includes a silicon cover plate, with pits in one of the handle layers to access electrical leads on the active layer. Additionally, Yu has developed methods for creating a microelectromechanical systems accelerometer using a single double silicon-on-insulator (SOI) wafer. This method involves forming a stationary electrode supported by rigid beams in the second layer of silicon while integrating a proof mass and at least one spring in the first layer.
Career Highlights
Throughout his career, Lianzhong Yu has made substantial contributions to the field by working with leading companies. Notably, he has engaged his expertise at Honeywell International Inc. and Input/Output, Inc., where he was instrumental in driving technological advancements in MEMS devices.
Collaborations
Yu has collaborated with recognized professionals in the industry, including his coworkers Duli Yu and Howard D. Goldberg. These partnerships illustrate the collective effort often required in pushing the boundaries of innovation within the field.
Conclusion
Lianzhong Yu exemplifies the spirit of innovation in MEMS technology, with a robust portfolio of patents that showcase his commitment to advancing sensor architecture. His work is not only significant for its technical merit but also for its impact on the future of microelectromechanical systems, further solidifying his position as a leading inventor in the area.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.