Pleasanton, CA, United States of America

Leonid Belau

USPTO Granted Patents = 6 

Average Co-Inventor Count = 3.1

ph-index = 2

Forward Citations = 18(Granted Patents)


Company Filing History:


Years Active: 2017-2025

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6 patents (USPTO):Explore Patents

Title: Innovations of Leonid Belau in Semiconductor Fabrication

Introduction

Leonid Belau is a prominent inventor based in Pleasanton, CA, known for his significant contributions to the field of semiconductor fabrication. With a total of five patents to his name, he has developed innovative methods that enhance the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

One of Leonid Belau's latest patents is titled "Methods and systems for managing byproduct material accumulation during plasma-based semiconductor wafer fabrication process." This invention addresses the challenges of byproduct material accumulation during the plasma generation process. By supporting a wafer on a specialized structure, the design allows for the control of byproduct volatizing gas, which helps prevent electrical arcing and particle contamination.

Another notable patent is "Profile optimization for high aspect ratio memory using an etch front metal catalyst." This method involves etching features in a silicon-containing stack below a patterned mask. By utilizing a halogen-containing etch gas and a metal catalyst, the process selectively enhances the etching of features, improving the overall quality and precision of semiconductor devices.

Career Highlights

Leonid Belau is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on developing advanced technologies that streamline semiconductor manufacturing processes, contributing to the company's reputation for innovation and excellence.

Collaborations

Throughout his career, Leonid has collaborated with notable colleagues, including Eric A. Hudson and John Patrick Holland. These partnerships have fostered a collaborative environment that encourages the exchange of ideas and the development of groundbreaking technologies.

Conclusion

Leonid Belau's innovative patents and contributions to semiconductor fabrication highlight his expertise and commitment to advancing technology in the industry. His work continues to influence the field, paving the way for future innovations in semiconductor manufacturing.

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