Location History:
- Peabody, MA (US) (2001 - 2006)
- South Hamilton, MA (US) (2010)
- S. Hamilton, MA (US) (2010)
Company Filing History:
Years Active: 2001-2010
Title: Leonard Michael Rubin: Innovator in Ion Implantation Technology
Introduction
Leonard Michael Rubin is a notable inventor based in S. Hamilton, MA (US). He has made significant contributions to the field of semiconductor technology, particularly in ion implantation. With a total of 4 patents to his name, Rubin's work has advanced the methods and technologies used in the semiconductor industry.
Latest Patents
Rubin's latest patents include innovative solutions that enhance the efficiency and accuracy of ion implantation processes. One of his notable inventions is the "Structures and methods for measuring beam angle in an ion implanter." This invention involves an ion beam angular measurement apparatus designed to provide feedback for a predetermined set ion beam angle. The apparatus features an arrangement of composite pillars formed on an insulating material, allowing for precise resistivity measurements that yield information about the ion beam angle during testing.
Another significant patent is the "Low-cost electrostatic clamp with fast de-clamp time." This invention outlines a method for manufacturing a semiconductor wafer electrostatic clamp. The process includes forming various conductive layers and regions on a mounting plate, creating a composite structure that enhances the clamp's performance.
Career Highlights
Leonard Michael Rubin is currently associated with Axcelis Technologies, Inc., a company known for its innovative solutions in the semiconductor equipment sector. His work at Axcelis has positioned him as a key player in the development of advanced ion implantation technologies.
Collaborations
Rubin has collaborated with several talented individuals in his field, including Shaun Dean Wilson and Yuri Erokhin. These collaborations have contributed to the successful development of his patented technologies.
Conclusion
Leonard Michael Rubin's contributions to ion implantation technology have made a significant impact on the semiconductor industry. His innovative patents and work at Axcelis Technologies, Inc. highlight his role as a leading inventor in this critical field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.