Kyungho Park

Title: Innovations by Kyungho Park in Liquid Treatment Technologies

Introduction

Kyungho Park is a notable inventor based in Kawasaki, Japan. He has made significant contributions to the field of liquid treatment technologies, holding a total of 4 patents. His work focuses on improving the efficiency and quality of liquid treatment processes, particularly in semiconductor manufacturing.

Latest Patents

Kyungho Park's latest patents include a liquid treatment method that utilizes alternating electrical contacts. This method involves a contact that comes into contact with a metal layer formed on a substrate being treated. The contact can engage with the surface being treated from an opposite surface through a through hole present in the substrate. Additionally, a plurality of needle bodies can be arranged to be in electrical contact with the metal layer of the substrate, allowing for power supply for electrolytic polishing or plating from multiple points on the surface. This innovation enhances the uniformity of the electric current sent to the surface being treated, thereby improving the overall liquid treatment process.

Another significant patent involves liquid treatment equipment designed to reduce the frequency of discarding treatment solutions. This equipment includes a treatment solution bath that accommodates the treatment solution for substrate treatment, a circulating system that moves the solution between the bath and external components, and a product removal unit that eliminates reaction products from the circulated solution. This design prevents the deterioration of the treatment solution, ensuring high-quality liquid treatment with less manufacturing burden.

Career Highlights

Kyungho Park is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing industry. His work at this organization has allowed him to develop and refine his innovative liquid treatment technologies, contributing to advancements in the field.

Collaborations

Kyungho Park has collaborated with notable coworkers, including Yoshinori Marumo and Yoshinori Kato. Their combined expertise has likely played a role in the successful development of his patents and innovations.

Conclusion

Kyungho Park's contributions to liquid treatment technologies have significantly impacted the semiconductor manufacturing industry. His innovative methods and equipment designs continue to enhance the efficiency and quality of liquid treatment processes.